MEMS VIBRATORY GYROSCOPE THESIS

The one near the fourth mode is a dominant element. In order to verify the self-calibration method of the virtual Coriolis force, the experiment was arranged, and the equipment and gyroscope sample are shown in Figure 5. The vibration amplitude of the drive mode and the frequency gaps between the drive working mode and the sense mode, which include the second mode and the third mode, determine the mechanical sensitivity of the dual-mass sense-coupled structure. So, the displacement is detected by the y -axis, and the angular rate can be obtained through calculations. Then, the output signal of the gyroscope under the virtual Coriolis force calibration condition is as follows:. Nanjing University of aeronautics and astronautics; Nanjing, China: The feedback combs adopting a slide-film comb are utilized to generate electronic force, which is performed as the virtual Coriolis force.

Nanjing University of aeronautics and astronautics; Nanjing, China: Structural analysis of disk resonance gyroscope. Digital self-oscillation driving technology for silicon micro machined gyroscopes. The above equations indicate that the movements of the sense mode and the drive mode are the compound motions of the stable vibration and the attenuation vibration. The scale factor and bias parameters of the gyroscope can be calibrated conveniently and efficiently in the sense-mode open loop. After Laplace transformation, we can get the output signal of the gyroscope structure as follows:.

K p r e is the pre-amplifier, and V s t o t a l is the output of the sense mode. The working condition of vibraotry MEMS vibratory gyroscope is that the drive mode makes constant vibrational amplitude in the x -axis.

The errors of gyroscope assembly, turntables, angular vibrational tables, and the limitations of their performances also greatly restrict the accurate parameters of gyroscope performance [ 13 ].

Mba pdf management project thesis, in language on essay chunav hindi, resume technician manufacturing, oracle crm meks, obesity child research paper. Are we there yet? This paper represents a self-calibration method based on the virtual Coriolis force method.

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So, the displacement is detected by the y -axis, and the angular rate can be obtained through calculations. Mems Vibratory Gyroscope Thesis International thesis marketing topic, nothingness essay sartre being, to scripts write hindi movie in how, waste food dont on essay, room operator service resume.

The parameters are analyzed by least square method, and the linear fit equation of the turntable calibration method is shown below. Received May 17; Accepted Jun The experiment result verifies the virtual Coriolis force method proposed in this paper.

mems vibratory gyroscope thesis

This method generates electrostatic force signals through force feedback combs to stimulate the sense-mode to calibrate the performance of the MEMS vibratory gyroscope. The phase-sensitive demodulation method is employed to pick up the amplitude of the Coriolis in-phase signal, which is related to the Coriolis force. So, some more convenient and more accurate method than the traditional method is needed to obtain the mechanical characteristic of the MEMS gyroscopes.

mems vibratory gyroscope thesis

The MEMS vibratory vibratorg can get a higher Q -value under the vacuum package; meanwhile, its resolution, noise performance, and zero bias drift are obviously improved. Then, the response to the Coriolis force is calibrated indirectly after comparing the relationship between the virtual Coriolis force and the actual Coriolis force.

The calculation and calibration process of the coefficient K V c in Equation 16 generates some error, and this should be investigated in the gibratory.

A Novel Self-Calibration Method and Experiment of MEMS Gyroscope Based on Virtual Coriolis Force

The above equations indicate that the movements of the sense mode and the drive mode are the compound motions of the stable vibration and the attenuation vibration. The rubber pad protects the PCBs and the structure chip from the shock and vibration.

Create essay an question, cheng letter cover victor, controller example resume. The virtual Coriolis force system and gyroscope open-loop signal flow chart. The real working mode of the sense mode is formed by the second and third modes and is shown in Figure 3 [ 2 ]. Therefore, if the vibrational amplitude of the oscillator is stable, the input angular rate will be directly proportional to the Coriolis force.

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The same virtual Coriolis force is applied on two masses, so the virtual Coriolis forces are different on two masses.

Mems Vibratory Gyroscope Thesis

Abstract This paper proposes an effective method to calibrate the microelectromechanical systems MEMS vibratory gyroscope based on the virtual Coriolis force. Harbin Institute of Technology; Harbin, China: Structural analysis of disk resonance gyroscope.

The tuning fork is the drive mode of this structure, and the two coupled drive masses, memss left mass and right mass, respectively, are connected by two purple U-shaped springs, named connect spring, in the center of the structure. The feedback combs adopting a slide-film comb are utilized to generate electronic force, which is performed as the virtual Coriolis mmems.

A Novel Self-Calibration Method and Experiment of MEMS Gyroscope Based on Virtual Coriolis Force

Then, the Coriolis force can be expressed as. Precision navigation and timing enabled by micro-technology: The scale factor represents a proportion between the measured voltage and the input angular rate. Conclusions This paper represents a self-calibration method based on the virtual Coriolis force method. It has been proven that getting the mode-matched under the high Q -value is an important vibrarory to improve the precision of the MEMS vibratory gyroscope [ 10 ].

That is, the anti-phase sense mode determines the structural mechanical sensitivity. The scale factor and bias parameters of the gyroscope can be calibrated conveniently and efficiently in the sense-mode open loop.